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Handbook of Semiconductor Interconnection Technology 2nd Edition

	Handbook Of Semiconductor Interconnection Technology 2Nd Edition by Geraldine C. Schwartz, Kris V. Srikrishnan
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	Contents: 1. Methods/Principles of Deposition and Etching of Thin Films, 2. Characterization, 3. Semiconductor Contact Technology, 4. Interlevel Dielectrics, 5. Metallization, 6. Chip Integration, 7. Reliability. ISBN 9781574446746
	Pages : 522

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